JDS-1立式接触式干涉仪

本仪器是一种采用量块或标准零件借以高精度的比较方式的立式精密长度计量仪器。主要用于150mm以下块规,亦可用作高精密度的长度和外径的精密测量,是各级计量室的基本长度计量仪器之一。
JDS-1 Interferometer is applicable for measurement of 3-4 grade gauge blocks or precision sizes up to 150 mm by high-precision comparison with a higher grade of gauge block or a standard reference component. It is one of the basic length-metrological instruments.
and cylinders.
JDS-1立式接触式干涉仪技术参数:
被测件长度 Max. measured length | 150 mm |
工作台行程 Lifting range of worktable
| 5 mm |
测杆移动范围 | 0.5mm |
分划板刻度范围 | ±50格 |
直接测量范围 Measuring range | 5-20μm |
分度值调整范围 Adjusting range of grad | 0.05-0.2 μm
|
推荐使用分度值Recommended grad | 0.1 μm
|
测量压力 Measuring force | (1.5±0.1) N |
仪器示值稳定性 Indication reliability | 0.02 μm
|
仪器误差 Indication error
| 数字显示 Digital display |
测量误差 Max.measurement error | | |  | | n 是格数, i是格值,λ是滤光片中心波长,△λ是滤光片波长误差 n is number of divisions, i is division value △λ is error of wavelength | | |
仪器体积 Dimensions
| 280×500×700 mm |
仪器重量 Weight
| 40 kg |
标准配件 Standard attachments | | | 五筋园台Five-Rib circular stage 九筋玛瑙台Agate stage 可调园平台Adjustable planar stage 辅助台Auxiliary stage, fixed 平面测帽Planar contact tip, Ф2 小球面测帽Small spherical contact tip 干涉滤光片 Wavelength filter | | | |
JDS-1立式接触式干涉仪工作原理:
利用光学杠杆的放大原理,将微小的位移量转换为光学影象的移动。其工作原理如左图所示。