技术参数： 可用于和 Nd：YAG 激光器的高次谐波
相机系统：
• 高动态范围
• 高分辨率紫外转换器
• Homogeneity up to > 98 % over active area
• 延迟时间短
• 损伤阈值高达15 J/cm²
• 单脉冲探测频率达1 KHz(由转换器的延迟时间决定)
| Laser | Wavelength | beam size | | | | | | | | |
| F2 | 157 nm | | | | | | | | | |
| ArF | 153 nm | | | | | | | | | |
| NdYag 5th | 213 nm | < 1mm | < 5x4 | < 9x6 | < 13x9 | < 18x13 | < 27x20 | <35x27 | <43x32 | < 50x38* |
| KrF | 248 nm | Laser spot | | | | | | | | |
| NdYag 4th | 266 nm | | | | | | | | | |
| XeCI | 308 nm | ML5222 10x | direct | ML5201 | ML5202 | ML5203 | ML5204 | ML5205 | ML5206 | ML5207 |
| XeF | 351 nm | ML5223 20x | | | | | | | | |
| NdYag 3rd | 355 nm | ML5224 40x | | | | | | | | |
* (larger sizes available on request, up to 200 mm
| Software | ML1201 | beamlux II advanced | |
| Camera | ML3720 | 1/2" CCD 782 x 582 | |
| | ML3743 | 2/3" CCD 1392 x 1040 | |
主要特点： Features
• 可测量所有的
• 在线质量控制
• real time evaluation of the laser with 1/10th of a second
• Synchronizes up to three cameras simultaneously for measurement of raw beam and processing plane
• TCP/IP remote control to control your laser system from your desk
